Here are some of the best universities in Germany for MS in Data Science, Analytics, and Big Data:

• Technical University of Munich (TUM) is consistently ranked among the top universities in the world for engineering and technology. Its MS in Data Science program is highly regarded and offers a strong curriculum that covers a wide range of topics in data science.
• Ludwig Maximilian University of Munich (LMU) is another top-ranked university in Germany. Its MS in Data Science program is offered in English and is designed to prepare students for careers in data science, analytics, and big data.
• University of Mannheim is a public research university located in Mannheim, Germany. It is one of the leading universities in Germany for business and economics, and its MS in Data Science program is designed to prepare students for careers in data science and analytics.
• University of Münster is a public research university located in Münster, Germany. It is one of the largest universities in Germany, and its MS in Data Science program is designed to prepare students for careers in data science and analytics.
• Karlsruhe Institute of Technology (KIT) is a public research university located in Karlsruhe, Germany. It is one of the leading universities in Germany for technology and engineering, and its MS in Data Science program is designed to prepare students for careers in data science, analytics, and big data.

These are just a few of the many great universities in Germany that offer MS programs in Data Science, Analytics, and Big Data. When choosing a university, it is important to consider your own interests and goals, as well as the reputation and curriculum of the program.